ASML and imec partner on chip research and sustainability
The organisations have signed a five-year strategic partnership agreement to deliver solutions for the semiconductor industry, with several focus areas for research and development including silicon photonics
ASML and imec have announced that they have signed a new strategic partnership agreement focusing on research and sustainability. The agreement has a duration of five years and aims to deliver valuable solutions in two areas: first, to develop solutions that advance the semiconductor industry and second, to develop initiatives focused on sustainable innovation.
The collaboration incorporates ASML’s whole product portfolio, with a focus on developing high-end nodes, using ASML systems including 0.55 NA EUV, 0.33 NA EUV, DUV immersion, YieldStar optical metrology and HMI single- and multi-beam technologies. The company says these tools will be installed in imec’s state-of-the-art pilot line and incorporated into the EU- and Flemish-funded NanoIC pilot line, providing the most advanced infrastructure for sub-2 nm R&D to the international semiconductor ecosystem.
Focus areas for R&D will also include silicon photonics, memory, and advanced packaging, offering full stack innovation for future semiconductor-based AI applications in diverse markets.
ASML adds that a new aspect of the collaboration involves a significant contribution to fund innovative ideas and activities in imec’s research funnel that bring environmental and societal benefits.
“This agreement marks the next step in the longstanding co-operation between ASML and imec,” said Christophe Fouquet, president and CEO of ASML. “It signals our joint ambitions to develop solutions for the semiconductor industry and fits our strategy of investing in technology and innovation that will benefit society at large.”
Luc Van den hove, president and CEO at imec, commented: “We are excited to continue our longstanding unique partnership with ASML, offering the industry access to the most advanced patterning solutions for over 30 years. The inclusion of ASML’s full product portfolio will allow us to expand and further mature the capabilities of our pilot line, providing the entire semiconductor ecosystem with the most advanced R&D to tackle the challenges of AI-driven technological advancements. Since imec has a strong focus on sustainable innovation, having this explicitly included in our partnership is a great addition.”
ASML adds that its investment in the partnership is complemented with funding made available by the Chips Joint Undertaking and the Flemish government (for the realisation of the EU Chips Act NanoIC pilot line), and by the Dutch government (as an Important Project of Common European Interest).
