Samco Inc announces sale of etching systems to III-V Lab
The company says that this is a significant milestone for its growth in Europe, and that the systems will play a crucial role in III-V Lab’s projects to enhance the performance and integration of III-V semiconductors with silicon
Samco Inc., a manufacturer of semiconductor processing equipment, has announced the sale of two of its advanced ICP-RIE systems, RIE-400iP, to III-V Lab, an industrial research lab based in France. Samco says this strategic collaboration underscores its commitment to supporting cutting-edge research and development in the field of III-V semiconductors and their integration with silicon circuits.
III-V Lab, a joint lab between Nokia, Thales, and CEA, is dedicated to the industrial research and development of optoelectronic and microelectronic components based on III-V semiconductors. Samco says the lab's expertise in compound semiconductor devices using indium phosphide, gallium nitride, gallium arsenide, and gallium antimonide aligns with its own innovative etching technology.
According to Samco, the RIE-400iP is a load lock Inductively Coupled Plasma (ICP) etching system designed to handle wafers up to ø100 mm (4”). The company says the advanced ICP Source HSTC (Hyper Symmetrical Tornado Coil) effectively delivers uniform, high-density plasma and ensures excellent etch profiles. Furthermore, Samco adds that this system with robust and reliable hardware provides exceptional process control, achieving high productivity for a wide range of etching applications, including indium phosphide, gallium nitride, gallium arsenide, silicon carbide, and various materials.
“We are pleased to introduce our top-notch equipment to a new customer in Europe,” said Tsukasa Kawabe, president and COO of Samco Inc. “To date, we have successfully served numerous clients with our expertise in compound semiconductor applications, and we are looking forward to having our systems aid the research into the potential wide-ranging and expanding capabilities of compound semiconductor materials.”
Samco says this deal marks a significant milestone for the company as it continues to expand its presence in the European market. The etching systems supplied to III-V Lab are intended to play a crucial role in their ongoing projects aimed at enhancing the performance and integration of III-V semiconductors with silicon technology.
Alexandre Larrue, research engineer at III-V Lab, commented: “Dry etching is a key technological building block for the development of III-V semiconductor innovative devices. The purchase of RIE-400iP ICP etching systems from Samco will allow III-V Lab to address new challenges in compound semiconductor manufacturing and reinforce both its R&D activities and its small volume production. III-V Lab is glad to make the choice of Samco as ICP etching systems supplier.”
