CORNERSTONECORNERSTONE is an open access silicon photonics rapid prototyping foundry service based at the University of Southampton, UK. The technology platform utilises industrially-compatible DUV lithography to enable seamless scaling-up of production volumes, whilst also retaining device level innovation capability using high-resolution e-beam lithography and versatile processes. CORNERSTONE offers 3 different silicon-on-insulator platforms (220 nm Si / 2 µm BOX, 340 nm Si / 2 µm BOX and 500 nm Si / 3 µm BOX) via a multi-project-wafer (MPW) service, enabling a plethora of applications including datacom, LIDAR, mid-infrared sensing etc. Bespoke fabrication batches and training courses are available upon request.
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